Influence of the Inert Gas Pressure on Intrinsic Stress in Diamond-Like Coating Deposited From Vacuum Arc Carbon Plasma

Within the framework of model nonlocal thermoelastic peak low-energy ion, formation intrinsic stress in a carbon coating deposited from vacuum arc plasma argon atmosphere is theoretically studied. It shown that flow particles bombarding contains, along with C+ ions, also Ar+ ions involved coating. The flux density resulting ionization losses passing through proportional to both and (pressure) argon. Expressions are obtained for depending on bias potential substrate pressure cases constant pulsed potentials. analysis expressions shows decrease increasing pressure.